5850EM Series Metal Sealed Thermal Mass Flow ControllersProven long-term stability. Ultra-pure performance for high pressure applications.
Models 5850EM / 5851EM
5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Features: - Long-term zero stability of <0.2% full scale per year
- <3 seconds settling time to command changes with negligible overshoot/undershoot
- Wide flow range – from 3 sccm up to 30,000 slpm
- High pressure rating - up to 1,500 psi
- Optional enhanced process internal finish - 5µ inch Ra avg
- Removable flow sensor
- Insensitive to mounting attitude
- Mechanically and electrically compatible with other mass flow controllers
- TTL compatible "valve off" and purge function
