5866RT Elastomer Sealed Pressure Controller & Flow MeterVersatility for high pressure applications across a wide flow measurement range.
The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate. Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.
Features: - Integral pressure transducer
- Response time: <0.8 seconds
- Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
- Wide range of full scale pressures (Max pressure 1500 psig)
- Optional metal seal available
- Electro-polished wetted surfaces (optional)
- Electrically activated valve override
- Suitable for upstream or downstream control
- Analog interface
